CKD Corporation AGD21R-A
High-durability process gas valve for high temperatures
Технические характеристики
| Industry | Components for chemical liquid supply facilities, Components for chemical gas supply facilities, Semiconductor manufacturing process (pre-process), N2 purging related products |
|---|---|
| Product name | High temperature/high durability valve |
| Fluid temperature | 150 to 200°C |
| Actual value | 100 million plus cycles |