CKD Corporation EVD-1000
Digital electro-pneumatic regulator
Технические характеристики
| Industry | Semiconductor manufacturing process (post-process), Special purpose / conveyance |
|---|---|
| Product name | Digital electro-pneumatic regulator |
| Max. flow rate (L/min) | 60 to 400 |
| Pressure range (kPa) | 0 to 900 |