CKD Corporation EVS2-100
Electro pneumatic regulator
Технические характеристики
| Industry | Semiconductor manufacturing process (post-process) |
|---|---|
| Product name | Electro pneumatic regulator |
| Pressure control range (MPa) | 0.001 to 0.1 |
| Размер порта | 4, 6 |
Electro pneumatic regulator
| Industry | Semiconductor manufacturing process (post-process) |
|---|---|
| Product name | Electro pneumatic regulator |
| Pressure control range (MPa) | 0.001 to 0.1 |
| Размер порта | 4, 6 |