CKD Corporation SFX40-15
Siloxane/Ozone Removers
Технические характеристики
| Industry | Semiconductor manufacturing process (post-process), Implementation |
|---|---|
| Product name | Siloxane/Ozone Remover |
| Диаметр цилиндра | Rc1/2 |
| Maximum processing flow rate（Siloxane） ※At a primary pressure of 0.7 Mpa | 700L/min（ANR） |
| Maximum processing flow rate（Ozone） ※At a primary pressure of 0.7 Mpa | 560L/min（ANR） |