KE
KEYENCE CORPORATION SI-F80R
SI-F80R series (Spectral-Interference Wafer Thickness Meter) - SI-F80R
Категории:
Технические характеристики
| Type | Wafer thickness measurement type Sensor head |
|---|---|
| Measurement range | 10 to 310 µm 0.000394" to 0.0122" (when n=3.5) |
| Possible detection distance | 80 to 81.1 mm 3.15" to 3.19" |
| Light source | Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 ) |
| Spot diameter | ø25 µm ø0.000984" |
| Linearity | ±0.1 µm ±0.000004" (when n=3.5) |
| Resolution | 0.001 µm |
| Sampling cycle | 200 µs |
| LED display | Target near center of measurement range : green lights. Target within measurement range : orange lights. Target outside measurement range : flashes orange. |
| Степень защиты (IP) | IP64 |
| Environmental resistance (Ambient light) | Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
| Рабочая температура | 0 to +50 °C 32 to 122 °F |
| Environmental resistance (Relative humidity) | 35 to 85 % RH (No condensation) |
| Environmental resistance (Vibration resistance) | 10 to 55 Hz, Double amplitude 1.5 mm 0.06" , 2 hours in each of the X, Y, and Z directions |
| Материал | SUS |
| Масса | Approx. 70 g (including cable) |