SMC Corporation XGT
Slit Valve XGT
Категории:
Технические характеристики
| Operating environmentalpressure (Pa)(abs) | Atmospheric pressure to 10 -6 |
|---|---|
| Fluid | Inert gas type vacuum |
| Opening window size(Height x Width)(mm) | 32 x 222 46 x 236 50 x 336 |
| Operatingpressure(MPa)(G) | 0.45 to 0.6 |