SMC Corporation XGTP
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
Категории:
Технические характеристики
| Operating environmentalpressure (Pa)(abs) | Atmospheric pressure to 10 -6 |
|---|---|
| Fluid | Inert gas |
| Opening window size(Height x Width)(mm) | 50 x 336 |
| Operatingpressure(MPa)(G) | 0.45 to 0.6 |